Assessment Of The Environmental Air In A
Semiconductor Industrial Area By FTIR And
GC/MS
Author(s)
J.-G. Lo, C.-C. Chang, S.-S. Ke & J.-D. Kuang
Abstract
Two methods were addressed in this paper to monitor the toxic volatile
compounds in the environmental air of a semiconductor industrial area. A FTIR
(open path Fourier Transform Infrared Spectroscopy) was set up at down wind
side of fence line. We identified compounds such as ammonia, methanol, carbon
tetrafluoride, sulfur hexafluoride in ppbv and sub-ppbv range including wind
speed and wind direction. Besides, 34 samples were collected by stainless steel
canisters each in three seasons over the whole industrial area and analyzed by
GC/MS with automated sample injection and data acquisition. Over 40
compounds were detected. Acetone (fall 9.59ppbv, winter 7.47ppbv, spring
10.21 ppbv), dichloromethane (fall 0.46 ppbv, winter 0.38 ppbv, spring 1.09
Keywords
Related Book
Other papers in this volume
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