Estimation Of VOCs Emission Factor For Semiconductor
Manufacturing Processes
Author(s)
H. Chein & M.-H. Chen
Abstract
Estimation of VOCs emission factor for
semiconductor manufacturing processes
H. Chein & M.-H. Chen
Center for Environmental, Safety and Health Technology,
Industrial Technology Research Institute,
Taiwan, R.O.C.
Abstract
Semiconductor manufacturing industry has contributed significantly to economic
growth and become the most important industry in Taiwan. However, the emission
of hazardous air pollutants (HAPs) produced by the industry is increasingly
deteriorating the ambient air quality. A great amount of volatile organic compounds
(VOCs) could be produced and emitted with waste gases from semiconductor
manufacturing processes such as cleaning, etching, and photolithography. The goal
of this study is to estimate the total VOCs emission from the semiconductor
industry based on the establishment of the emission factor which is defined as the
emission rate (kg/month) divided by the amount of chemical usage (L/month). The
VOCs emission rate was measured by the continuous emission monitor
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