Modeling Of Transient Enhanced Dopant
Diffusion By Using A Moment-based Model
Describing Point-defect Clustering
Author(s)
D. Stiebel, P. Pichler and H. Ryssel
Abstract
The accurate simulation of the transient enhanced diffusion (TED) of do-
pants during the post-implantation anneal is still a big challenge for process
simulation. As a point-defect mediated process, the kinetics of TED is
mainly determined by the interaction of intrinsic point defects with extended
defects formed by point-defect agglomeration. Using a continuum model for
the simulation, the reaction-diffusion equations describing the behavior of
the species considered have to be solved numerically. In such an approach,
a partial differential equation has to be solved for each kind and each size
of extended defects. Because extended defects may consist of some hundred
point defects, such models lead to inadmissibly high CPU times and CPU
resources
Keywords
Related Book
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$counter = '0';
foreach ($paper['book']['Paper'] as $otherPaper) {
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