Quantum Mechanical Device Simulation Of
Ultrasmall MOSFETs
Author(s)
T. Miyoshi and H. Tsuchiya
Abstract
With the scaling down of LSI devices, the quantum mechanical treatment of
carrier transport becomes more important in device modeling. In this paper,
we propose a novel quantum device model based upon a direct solution of
the Boltzmann equation for multi-dimensional practical use. The quantum
effects are represented in terms of quantum mechanically corrected potential
in the classical Boltzmann equation.
1 Introduction
For more than thirty years, the progress of LSI technology has been
based upon the downsizing of MOSFET's. because the downsizing
has been the most effective way to improve the performance and to
increase the packing density of LSI circuits. The number of devices
contained on a single chip has approximately
Keywords
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