Hot Spots Caused By Contact Inhomogeneities In 4H- And 6H-SJC
Schottky Structures
Author(s)
R. Kurel, T. Rang
Abstract
Hot spots caused by contact inhomogeneities in
4H- and 6H-SiC Schottky structures
R. Kurel, T. Rang
Department of Electronics
Tallinn Technical University, Estonia
Abstract
By manufacturing of large area Schottky contacts to semiconductor surfaces, the
interface area will have a number of inhomogeneities (e.g. grain size effects,
diffusional creeps, other boundary effects, etc.). These inhomogeneities lead to
the local characteristics at the interface. It means that the interaction of several
metals or other materials at the semiconductor interface will lead to the formation
of different local barriers at the different sub-regions. The electrical and thermal
behavior of such effects is studied using SPICE simulation package SCHOTSIC,
developed at the Department of Electronics, TTU. This package simulates both
electrical and thermal processes in Schottky diode using standard SPICE envi-
ronment. Iterative simulation process is used to coupe with self-heating effect.
The Schottky contact of s
Keywords
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