Advances In Surface Analysis Technology
Author(s)
X Q. Jiang & L. Blunt
Abstract
The needs of modern surface metrology assessment cover not only the extraction
of roughness, waviness, but also identification of surface texture or the multi-
scalar properties of a surface topography. In answer to this, the newly
developing wavelet theory has been introduced into surface characterisation in
1994. Wavelet analysis employs time-frequency windows and offers the relevant
time-frequency analysis, as a result, it can divide surface topography into
different frequency components, and then study each component with the multi-
resolution. This paper provides a survey of the most recent work in the field of
surface metrology by using wavelet theory. The major wavelet models used in
surface metrology will be introduced and the basic theory, algorithm and the
properties of these models will also be discussed.
1 Introduction
Typical surface analysis
Keywords
Related Book
Other papers in this volume
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