Production Of CrN/NbN Superlattice Coatings By Cathode Switching
Reactive Cathodic Arc Evaporation
Author(s)
C. Pecchio, E. Bemporad, D. De Felicis, S. De Rossi & F. Carassiti
Abstract
Production of CrNINbN superlattice coatings
by cathode switching reactive cathodic arc
evaporation
C. ~ecchio', E. ~ e r n ~ o r a d ~ , D. De ~ e l i c i s ~ , S. De ~ o s s i '
& F. carassiti2
I Surface Engineering Dept, Istituto Scientijico Breda S.p.A., Italy
2 Mechanical and Industrial Engineering dept., Univ. "ROMA TRE"
Italy
Abstract
CrN/NbN superlattice and CrN coatings, approximately 3 pm in thickness, have
been deposited on tool steel samples by a modified reactive cathodic arc
evaporation technique (CAE) in an industrial-size chamber. Superlattice
deposition was achieved by triggering alternatively on Cr and Nb cathodes,
obtaining layers of about 4-5 nanometers. X-ray diffraction, scanning and
transmission electron microscopy, atomic force microscopy and energy
dispersive X-ray analysis were used to determine microstructure and chemical
composition of both coatings and coating defects. Diffraction techniques
showed for the CrN coating a (220) preferred orientation and a strongly
p
Keywords
Related Book
Other papers in this volume
Warning (2)
: foreach() argument must be of type array|object, null given [in
/var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/templates/Papers/view.php, line
364]
Code
$counter = '0';
foreach ($paper['book']['Paper'] as $otherPaper) {
if ((!empty($otherPaper['name'])) && ($counter < '7') && ($otherPaper['available'] == 1)) {
Cake\Error\ErrorTrap->handleError() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/templates/Papers/view.php, line 364
/var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/View/View.php /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/View/View.php, line 1188
Cake\View\View->_evaluate() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/View/View.php, line 1145
Cake\View\View->_render() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/View/View.php, line 785
Cake\View\View->render() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Controller/Controller.php, line 712
Cake\Controller\Controller->render() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Controller/Controller.php, line 516
Cake\Controller\Controller->invokeAction() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Controller/ControllerFactory.php, line 166
Cake\Controller\ControllerFactory->handle() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Controller/ControllerFactory.php, line 141
Cake\Controller\ControllerFactory->invoke() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/BaseApplication.php, line 362
Cake\Http\BaseApplication->handle() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Runner.php, line 86
Cake\Http\Runner->handle() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Middleware/CsrfProtectionMiddleware.php, line 169
Cake\Http\Middleware\CsrfProtectionMiddleware->process() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Runner.php, line 82
Cake\Http\Runner->handle() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Middleware/BodyParserMiddleware.php, line 157
Cake\Http\Middleware\BodyParserMiddleware->process() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Runner.php, line 82
Cake\Http\Runner->handle() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Routing/Middleware/RoutingMiddleware.php, line 118
Cake\Routing\Middleware\RoutingMiddleware->process() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Runner.php, line 82
Cake\Http\Runner->handle() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Routing/Middleware/AssetMiddleware.php, line 69
Cake\Routing\Middleware\AssetMiddleware->process() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Runner.php, line 82
Cake\Http\Runner->handle() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Error/Middleware/ErrorHandlerMiddleware.php, line 115
Cake\Error\Middleware\ErrorHandlerMiddleware->process() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Runner.php, line 82
Cake\Http\Runner->handle() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/debug_kit/src/Middleware/DebugKitMiddleware.php, line 60
DebugKit\Middleware\DebugKitMiddleware->process() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Runner.php, line 82
Cake\Http\Runner->handle() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Runner.php, line 60
Cake\Http\Runner->run() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/vendor/cakephp/cakephp/src/Http/Server.php, line 104
Cake\Http\Server->run() /var/www/dce7ae55-385b-4ffa-8595-3ec5e61ff110/public_html/app/webroot/index.php, line 37
[main]
