Simulation Of The Formation Mechanism Of A
Viscous Layer For The Electropolishing Process
Author(s)
S.-J. Lee, J.-J. Lai & Y.-T. Lin
Abstract
Electropolishing (EP) is a surface finishing treatment method. The surface
quality indices such as surface roughness, cleanness and corrosion resistance
could be improved through this process. Because of these benefits, the
electropolishing process is applied to fabricate high cleanness apparatus for
semiconductor and optical pharmaceutical industries.
Electropolishing is an electrochemical reaction process. The uniform and
stable passive film is the key mechanism in enhancing the surface quality.
However, the forming of passive film is influenced by the current distribution,
fluid field and diffusion phenomena. Therefore, there are many defects such as
pits, flow marks and scrape which could be found after the electropolishing
process. These defects destroy the uniformity of the surface quality and induce
local corrosion.
The goal of this study is aimed at simulating the formation of a viscous layer
and establishing numerical a model to predict its thickness and uniformity. In
this study, the commercial software of FEMLAB was employed to establish a
multi-physics model which contained the effects of fluidity and diffusion. The
mechanism of passive film formation, the influence of fluid velocity and the
thickness variation of the viscous layer were investigated through numerical
simulation.
Keywords: electropolishing, passive film, numerical simulation, multi-physics.
1 Introduction
The electropolishing is a precision surface finishing treatment method. It could
enhance the cleanliness and smoothness of a specimen. The thin passive film
formed on the surface will also improve its corrosion resistance [1-3]. The
Keywords
electropolishing, passive film, numerical simulation, multi-physics.
Related Book
Other papers in this volume
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