Nanoscratch Evaluation Of
Adhesive Strength Of Cu/PI Films
Author(s)
K. Tanaka, K. Gunji & T. Katayama
Abstract
A scratch test has provided a simple, rapid means of assessing the adhesion
strengths of thin films on substrates. However, it is not standardized how to
detect the interfacial failure. Copper thin films deposited on Polyimide (PI)
substrates are used for Flexible Print Circuit (FPC). It is needed to improve and
measure the adhesive strength of Cu films on PI substrates to avoid interfacial
fractures caused by cyclic bending. In this study, in order to improve the
adhesive strength, the surfaces of PI substrates were modified by ion beam using
argon or oxygen with a linear ion source and the adhesion strengths of Cu films
on PI substrates were measured using nanoscratch tests. Cu thin films were
deposed by Physical Vapor Deposition (PVD) using an electron beam. The
friction coefficient rapidly decreased and normal displacement rapidly increased
at the delaminated point at the same time. The slope of the friction coefficient
increased at the delaminated point, whose normal load is called the critical load.
The scratched surfaces were observed from films (Cu) side and substrate (PI)
side. A transparency of PI substrates allowed us to observe the interfaces
between Cu film and PI substrate. The scratched mark observed from substrate
side started at just the point where the slope of the friction coefficient changed.
As the roughness of the surface of polyimide substrates increased, critical load
increased.
Keywords: nanoscratch test, adhesive strength, copper films, polyimide
substrates.
1 Introduction
There are a lot of methods to measure the adhesive strength of interfaces
between coatings and underlying substrates, which include pull-off test, peel test,
Keywords
nanoscratch test, adhesive strength, copper films, polyimide
substrates.
Related Book
Other papers in this volume
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