Computational Versus Experimental Methods In Laser Processing Of Binary Semiconducting Systems
Author(s)
R. Cerny, P. Prikryl
Abstract
Computational versus experimental methods
on laser processing of binary semiconducting
systems
R. Cerny', P. PfikryP
^Department of Structural Mechanics, Faculty of Civil Engineering,
Czech Technical University, Czech Republic
^
Mathematical Institute, Academy of Sciences, Czech Republic
Abstract
A computational model of pulsed laser-induced phase transitions in binary
semiconducting systems is presented. The nonequilibrium phase change
processes due to the high velocities of the interface are modeled using the
concept of Wilson-Frenkel interface response function and nonequilibrium
segregation coefficients are also considered. In the computational experi-
ments, two real experimental situations are simulated, the first being the
irradiation of a 150 nm 8*50Geso alloy on 500 nm SOS (silicon on sub-
strate) by Q-switched ruby laser (694 nm, 30 ns FWHM), the second the
irradiation of the system of 25 nm of amorphous Ge and 210 nm polycrys-
talline silicon on quartz substrate b
Keywords
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