Sensitivity Of A Stress Measurement Method For Copper Electroplating
Using The Effects Of Stress Concentration
Author(s)
S.J. Kwon, T. Kinji, K. Ogawa & T. Shoji
Abstract
Sensitivity of a stress measurement method for
copper electroplating using the effects of stress
concentration
S. J. Kwon, T. Kinji, K. Ogawa & T. Shoji
Fracture Research Institute,
Tohoku University, Japan.
Abstract
This study deals with the sensitivity of a copper electroplating method to
measure stress by taking the effect of stress concentration into account. The
electroplating method of strain analysis is based on the colour changes on the
surface of electroplated copper resulting from cyclic stress. This has proved to be
of use in determining accurately the peak stress in notches and in measuring the
microscopic strain distribution in metals. However, there is a limitation on the
measurement of stress using copper electroplating; low level stress, below 130
MPa, cannot be measured. The effect of stress concentration brought about by
the control of fine slits was used in copper foil electroplating in order to increase
the sensitivity. The results showed that the sensitivity was improved s
Keywords
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