Modeling Electrodeposition In LIGA Micro-fabrication Using An
Arbitrary Lagrangian-Eulerian Formulation For Moving-boundary
Tracking With Repeated Re-meshing
Author(s)
K. S. Chen
Abstract
Modeling electrodeposition in LIGA
micro-fabrication using an arbitrary
Lagrangian-Eulerian formulation for movingboundary
tracking with repeated re-meshing
K. S. Chen
Sandia National Laboratories, USA
Abstract
Electrodeposition is a key process in LIGA (Uthographie, Galvanoformung,
Abformung - German words for lithography, electroplating and molding) -
microfabrication, which is increasingly demonstrated to be a viable technology
for fabricating micro-devices or parts. LIGA Electrodeposition involves complex
multi-physics phenomena: 1) diffusion, migration, and convection of charged
species in a centimeter-scale electrolyte-bath region and in micron-scale featurecavity
or trench regions; 2) homogeneous and heterogeneous electrochemical
reactions; and 3) moving deposition surface or surfaces on which metal ions
(e.g., ~ i " ) are electrochemically reduced to form a pure metal or an alloy.
In this paper we report efforts toward developing a predictive multidimensional
computer model for simula
Keywords
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$counter = '0';
foreach ($paper['book']['Paper'] as $otherPaper) {
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