EUV Detection System With
Calibrated Responsivity
Author(s)
J. Mikolajczyk & Z. Bielecki
Abstract
We describe a measuring system of EUV radiation energy using special
calibration responsivity. This system is specified by responsivity of 0.043 A/W
at the wavelength range of 13.5±0.5 nm (FWHM=7.2%). A determination of the
calibration responsivity for a laser-plasma source with Xe/He gas puff target is
also discussed. This parameter makes it possible to reference measurement
results to the standard wavelengths band of 13.5±0.13 nm (FWHM=2%). The
value of the calibration responsivity depends on the spectra of measured
radiation and features of the system elements. In this paper, the analysis and
investigation results of the source and the measuring system are demonstrated.
Keywords: EUV radiation, optical sensors, energy meter.
1 Introduction
Accurate measurements of energy radiation are very important in
nanolithography. The resists or masks can be damaged due to the measurements
errors. Nowadays, energy meters of EUV radiation are also used for testing of
lithography tools. The investigations are connected with characterization of EUV
radiation sources, features of optical elements, etc. The responsivity and
measurement accuracy are the main features of the measuring devices. The
parameters are referenced to a standard wavelength range of 13.5±0.13 nm. The
range corresponds with the FWHM=2%.
The developed commercial meters are usually built from multilayer mirrors
and semiconductor detectors [1]. The mirrors simplify construction of the
instruments. Using photodiodes makes it possible to achieve a high efficiency
and plain measurements procedures. The pulse energy of radiation is determined
by the measured charge generated in a photodiode, the value of the detector
Keywords
EUV radiation, optical sensors, energy meter.
Related Book
Other papers in this volume
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