Design Of A Vacuum Based Test Rig For
Measuring Micro Adhesion And Friction Force
Author(s)
M. A. Yaqoob, M. B. de Rooij & D. J. Schipper
Abstract
Mechanisms operating in low pressure (vacuum), nitrogen or other special
environments are found in many applications. Examples are medical
instrumentation, electron microscopes, lithography systems, as well as aviation
and space applications. The positioning accuracy and drifts in these mechanisms
are strongly influenced by the frictional behaviour of the mating materials. The
cause for both drift and positioning accuracy are stick-to-slip and slip-to-stick
transitions at asperity level, resulting in a displacement at macrolevel. This paper
discusses the experimental setup designed and manufactured to validate a model
which relates friction and positioning accuracy for a particular pair of material at
asperity level. A simplified form of a single asperity contact is a ball in contact
with a flat surface. The experimental setup has been designed to validate the
friction and adhesion models. Snap–in, pull–off experiments and friction force
measurements can be performed with the resolution of 5 μN. The maximum
normal load that can be applied with this system is 100 mN. The setup is capable
of working at 10-6 mbar vacuum level. A 2 Degree of Freedom (DOF) elastic
hinge mechanism is the heart of the setup and measures the normal and
tangential load with the help of capacitive displacement sensors. In the setup,
high precision positioning stages have been used which are capable of moving
20 mm in XYZ with an accuracy of 20 nm. The setup is also able to perform
friction measurements with the same accuracy as mentioned above. Design and
performance of the setup will be discussed and the results are compared with the
theory.
Keywords: adhesion force, friction force, force-displacement curves, positioning
accuracy, high vacuum, mechanical vibrations.
Keywords
adhesion force, friction force, force-displacement curves, positioning
accuracy, high vacuum, mechanical vibrations.
Related Book
Other papers in this volume
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