Hardness Determination Of EBiD-layers
Containing Tungsten And Cobalt
Author(s)
T. Wich, T. Luttermann & I. Mircea
Abstract
Electron Beam induced Deposition (EBiD) is a promising process technology for
nano-structuring and -prototyping inside a scanning electron microscope (SEM).
Firstly, the EBiD-process used for layer deposition is described. We have
performed nanoindentation experiments on EBiD-layers with the purpose of
determining their hardness. A special setup for nanoindentation inside the SEM
is described. Before performing tests on EBiD-layers, calibration measurements
on fused silica and sapphire were necessary. Hardness of the silicon wafer
substrate and of the EBiD-layers has been also determined. The layers were
small quadrates, with dimensions in the range of 20 x 20 µm2, with a thickness
varying between 93 and 2256 nm. Nanoindentation tests on the deposited layers
revealed values between 7.1 and 10.0 GPa for tungsten containing deposits and
between 3.4 and 3.5 for cobalt containing deposits depending on the
metal-content.
Keywords: Electron Beam induced Deposition, hardness, nanoindentation.
1 Introduction
The effect of Electron Beam induced Deposition (EBiD) was first observed in
1933, by R.L. Stewart. At that time he noted that on surfaces under electron
bombardment thin insulating films have been observed [14]. These insulating
films have been regarded as an inevitable effect in evacuated electron tubes.
Ennos et al. have conducted tests with different seals, grease materials, and oil
for vacuum pumps, for determining their influence on the contamination
thickness [6]. Based on the results of these tests, Christy developed in 1960 a
theoretical model which can explain the deposition of polymer films under
electron bombardment [2]. Later, these deposits have always been seen as a
Keywords
Electron Beam induced Deposition, hardness, nanoindentation.
Related Book
Other papers in this volume
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