Microactuators For Nanotechnological
Applications Based On The Phenomenon Of
Contact Deformations
Author(s)
V. Portman & B.Z. Sandier
Abstract
Contact deformations are treated as a potential force-to-motion converter, i.e.,
microactuator, for displacements in the submicron domain. The transformation
factor of this converter equals the contact stiffness. Development of such
microactuators for heavily loaded high precision equipment is the applying goal
of the research. The results of experimental and theoretical investigations on the
exploitation of contact deformations show that it is possible to obtain a
transformation ratio 1-5 nm/H in the region of 10~3-10~5 mm with
reproducibility 0.02-0.03 |im.
1 Introduction
In certain branches of modern machining the required accuracy may be of the
order of 10-2 jim. The design engineer working in this domain will encounter the
following spec
Keywords
Related Book
Other papers in this volume
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