Statistical Analysis Of SEM Image Noise
Author(s)
C. Mansilla, V. Ocelík & J. Th. M. De Hosson
Abstract
The stress-relaxation technique is one of the most popular approaches to measure
macroscopic residual stresses in different kinds of materials. Recently, by using a
dual beam microscope (Scanning Electron Microscope (SEM) and Focused Ion
Beam (FIB) in one chamber), a new option of detection of internal stresses on a
microscopic scale appeared. FIB is used to release local strain induced by
internal stresses and Digital Image Correlation (DIC) of SEM images collected
before and after stress release is applied to quantify strain release at the surface.
However, the combination of DIC and SEM brings some new important
aspects in the analysis of noise generated by the special way of building an SEM
image. Because the magnitude of the strain is quite often very close to the noise
level, it is very important to test each SEM column which is used in these
measurements. It is necessary to study conditions for minimization and
randomization of the noise generated during SEM image collection by
instabilities inside electron column and sample chamber as well. In the present
work, the methods for such testing will be given for a Philips XL30 ESEM.
Keywords: residual stress, scanning electron microscopy, focus ion beam, digital
image correlation, self-correlation image, slit milling.
Keywords
Keywords: residual stress, scanning electron microscopy, focus ion beam, digital
image correlation, self-correlation image, slit milling.
Related Book
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