Enhanced Quasi-multiple Medium Technology For Fast Finite-domain
Electrostatic BEM Simulation
Author(s)
W. Yu & Z. Wang
Abstract
Enhanced quasi-multiple medium technology
for fast finite-domain electrostatic BEM
simulation
W.Yu & 2. Wang
Department of Computer Science and Technology,
Tsinghua University, China.
Abstract
Fast 3D electrostatic simulations are of increasing importance in the area of VLSI
interconnects and MEMS, especially for the current deep submicron
semiconductor technology. The parasitic capacitance among the interconnects is
usually simulated within a finite domain with the mixed Neumann and Dirichlet
boundaries. The boundary element method (BEM) is very suitable for such kind
of electrostatic computation. Furthermore, a new technology called quasimultiple
medium (QMM) method has been proposed to accelerate the large-scale
BEM computation. The QMM technology has been applied to the 3D finitedomain
BEM simulation of the interconnect capacitor, and it greatly reduced the
computational time and memory usage. In this paper, an approach is presented to
enhance the QMM technology, in which the QMM cutting
Keywords
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