Process Development For 3D Laser Lithography
Author(s)
N. Kaste, A. Filbert, U. Mescheder, T. Rang & G. Rang
Abstract
The field of micro-electro-mechanical-systems (MEMS) grew out from the
integrated circuit (IC) industry. So far the main fabrication techniques used in
MEMS are planar technologies, which set limitations to the sensor/actuator
design. Therefore greyscale (3D) technology seems to be the method for
fabrication of three-dimensional structures in a single lithography and etching
step. The idea in fabricating a 3D photoresist structure is the controlled
transmission of UV light intensity during the exposure process. The result of this
work is to provide a preliminary process solution for the formation of nearly
arbitrarily shaped 3D forms in photoresist using Heidelberg Instrument DWL
66FS direct writing lithography tool. For this purpose, the investigation results of
the exposure tool possibilities of the photoresist selection for 3D applications and
as a real greyscale application, slopes with different angles, which will be used
for making a tactile sensor, are provided.
Keywords: MEMS, greyscale, direct laser writing, 3D photolithography, tactile
sensor, medical application.
Keywords
MEMS, greyscale, direct laser writing, 3D photolithography, tactile
sensor, medical application.
Related Book
Other papers in this volume
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